【摘要】 作者用自行设计的直流气体放电活化反应蒸发装置制备出平均粒径约为40nm的SnO₂超微粒子薄膜.研究了不同氧分压下所得SnO₂超微粒膜的形貌、结构和组成等特性,以及不同样品对各种易燃气体的气敏特性,得出了灵敏度随氧分压及灵敏度随工作温度的变化曲线.更多还原

【Abstract】 The tin dioxide ultrafine particle films with the average particle size of 40 nmhave been deposited by DC gas discharge activating reaction evaporation technique. Themophology,structure and composition of the films preparated at various oxygen partialpressure was discussed. The gas sensing properties of these samples to various in-flammable gases were also studied. The curves of the sensitivity as a function of oxygengas pressure and the sensors operating temperature were obtainde,respectively.更多还原