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AGA-100型四极质谱计分析和真空系统污染后的清洗
Cleaning of Analysis and Vacuum System of AGA-100 Quadrupole Mass Spectrometer which was Contaminated
【摘要】 本文介绍了AGA-100型四级质谱计分析和真空系统污染后的清洗方法,并对清洗前后的性能指标做了对照测试,结果表明此法是可行的.
【Abstract】 In this paper,a method of cleaning the contaminated analysis and vacuum system of AGA-100 quadrupole mass spectrometer is introduced. The contrast tests of main spesifications which at the beginning and after the cleanning have been done,the results show that the method is available.
- 【文献出处】 真空 ,Vacuum , 编辑部邮箱 ,1993年02期
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