【摘要】 为了满足对四极质谱计定量分析的需求,建立了一台四极质谱计校准与应用研究系统。该系统可用于四极质谱计分压强灵敏度及图样系数的校准和四极质谱计稳定性的研究,并可用作演示系统。为实现在各种应用条件下的分析应用,本系统采用四种进样系统,把四极质谱分析器与被测系统连接起来,即超高真空条件下直接进样、10^-2～10²Pa压强分析时的分子流动态进样、高压强下直到大气压的毛细管进样以及微量气体分析时的静态或准静态进样系统。更多还原

【Abstract】 A calibration and application study system of QMS has been designed and built in Tsinghua University in order to support the QMS development of our domestic instrumental and application studies. This system can be used to calibrate the partial pressure sensitivities and cracking patterns of QMS, to study the stability of QMS and to be a demonstration system. In order to realize the analysis under different kinds of applications, four sampling systems used to interface between quadrupole mass analyzer and the process system are incorporated. They are the direct inlet system under UHV, the molecular flow dymamic inlet system for the analysis from 10^-2 to 10² Pa pressure, the capillary inlet system for the analysis from high pressure to the atmosphere pressure and the static or quasi-static inlet system for the analysis of small quantities of gases.更多还原