【摘要】 分析了导致平膜片式压力传感器非线性的三个因素:弯曲应变、薄膜应变以及电桥输出非线性,导出了该传感器的输出特征函数,进而通过非线性工作区的分析得出传感器非线性最小的设计方法。更多还原

【Abstract】 Three factors, i.e. bending strain, membrain strain and non-linear bridge output which result in the non-linearity of flat diaphram pressure transducer are analyzed and the output eigen function of the transducer is derived. Thus, the non-linear working area is analyzed and the design method of the transducer with minimum non-linearity is obtained.更多还原