【摘要】 介绍一种应用电光晶体补偿位相测量微小位移的方法,着重分析其测量精度,并应用这种方法校正压电陶瓷的线性,精度优于1%波长。更多还原

【Abstract】 A small displacement measuring method of electro-optic crystal compensating phases is described,with the emphasis on the analysis of its measurement accuracy.The method is used to correct the linearity of piezo-electric ceramics, its accuracy is better than 1% of wavelength.更多还原