【摘要】 本文提出一种利用环形三叠片超声振子箝位的压电直线微动马达.这种马达的箝位振子与导轴形成摩擦付。振子共振时其动摩擦系数与静摩擦系数之比降为～0.1。箝位振子的激励电压仅为±80V(峰峰值).马达速度为0—2mm/min;位移分辨率为50nm;驱动力约0.2kgf.这种马达还具有工艺简单的特点.更多还原

【Abstract】 This paper reports a kind of linear piezoelectric inchworm motor using position-gripped ultrasonic vibrator which is a ringshaped three-pile piece construction. The position-gripped vibrator and guide shaft of the motor constitute the friction pair. When the vibrator is in the resonance state, the ratio of moving friction coeff cient to static one will decrease to-0.1. The driving voltage of position-gripped vibrator is only ±80V (Vp-p). The velocities of motor are 0-2 mm/min; the displacement resolution is 50 nm, and motor’s techniques is simple.更多还原