【摘要】 同轴正碰撞离子散射谱仪(CAICISS)是一种新形表面分析仪器,利用散射角为180°的散射离子可定量地分析表面结构。只需有一个正对着试样位置的小孔,就可把同轴正碰撞离子散射谱仪安装在任何一种表面分析仪器或薄膜生长设备上。本文将简要叙述同轴正碰撞离子散射谱仪的原理、结构和应用。更多还原

【Abstract】 Coaxial Impact-collision Ion Scattering Spectroscopy (CAICISS) is a new surface analysis equipment. Surface structures can be analyzed quantitatively by taking the experimental scattering angle to be just 180°. CAICISS can be attached to any kinds of surface analysis equipments or thin-film production devices thorugh a single port directed toward the sample position. This paper will describe the principle, structure and application of CAICISS briefly.更多还原