【摘要】 各种化学气相沉积和金刚石薄膜技术的发展,为金刚石薄膜在光学、超硬工具涂层等领域提供了广阔的应用前景。而这些应用需要对沉积获得的金刚石膜粗糙表面进行抛光。本文介绍了新近发展的金刚石薄膜抛光技术。并对其发展前景进行了探讨。更多还原

【Abstract】 Diamond films deposited by a variety of Chemical Vapour Deposition(CVD) technoloies have opened a new era of applications in optics,tools and many other fields. Such applications require to grind the surface of the films because of their high surface roughness in as-deposited state.This article briefly introduces the recently developed grinding methods and discusses the further development in this field.更多还原