【摘要】 利用溶胶-凝胶法研制了 SiO₂ 薄膜.研究了溶液中组成,即 H₂O/Si（OC₂H₅）₄摩尔比对薄膜形成的影响.在溶液中添加了干燥控制化学剂,研究了添加剂对成膜性的影响.结果表明,利用H₂O/Si（OC₂H₅）₄的摩尔比>15,并且添加适量的添加剂的溶液,能够制得结构均匀而不开裂的 SiO₂薄膜.用扫描电镜观察了薄膜的微观结构,并测定了薄膜的厚度.更多还原

【Abstract】 The silica films were prepared by a new Sol-gel process from tetraethylorthosilicate（TEOS）solutions.In the present study,the solutions containg different H₂O/Si（OC₂H₅）₄ molar ratioshave been prepared,and as drying control chemical additive（DCCA）,appropriate amount ofglycerin was added in these solutions.Microscope slides have been spin coated in these solutions.After backing,the film thickness has been determined.The film microstructure was observedby scanning electron microscope.It was shown that the H₂O/Si（OC₂H₅）₄ molar ratio andglycerin clearly affect the film microstructure.As a result,the solutions of H₂O/Si（OC₂H₅）₄≥15 by the addition of glycerin are good for preparing uniform SiO₂ films.更多还原