【摘要】 采用磁控溅射沉积在金属或玻璃基体表面上的氮化锆薄膜,具有良好的抗腐蚀和耐摩擦性能,摩擦系数小,显微硬度高达2195kg/mm~2,是一种性能优良的功能薄膜材料。更多还原

【Abstract】 In this paper, ZrN films are produced by magnetron reactive sputter deposition on the substrate of metals or glass. The test shows that ZrN films have better properties of anti-erosion and anti-friction, and its coefficient of friction is low, while microhardness is high to 2195kgmm-2. Hence ZrN films are functional films that have good properties.更多还原