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电沉积砷化镓薄膜的研究
A STUDY ON ELECTRODEPOSITION GaAs FILMS
【摘要】 报道了电沉积法制备多晶砷化镓(GaAs)薄膜的工艺。利用扫描电子显微镜、X射线衍射仪、分光光度计和C-V测试仪对薄膜进行了测试,其成分为Ga0.91As1.09。根据Mott-Schottky曲线,计算了薄膜的能带位置。最后测量了Ga0.81As0.09/ 电解液结的光电化学特性。
【Abstract】 Electro-deposition technology for preparing GaAs films is described. The characteristics of the films are measured by using SEM, X-ray diffractometer, Spectro-photometer and C-V tester. Results show that the atomic percentage of electro-deposition film is Ga0.91As1.09. On the basis of Mott-Schottky plot, the positions of energy band are found. The photoelectro-chemical characteristics of Ga0.91As1.09/electrolyte junction are also measured.
【关键词】 电沉积;
多晶砷化镓薄膜;
工艺;
成分;
能带位置;
光电化学特性;
【Key words】 electrodeposition; polycrystal GaAs film; technology; composition; position of energy band; photoelectro-chemical characteristics;
【Key words】 electrodeposition; polycrystal GaAs film; technology; composition; position of energy band; photoelectro-chemical characteristics;
- 【文献出处】 太阳能学报 ,Acta Energiae Solaris Sinica , 编辑部邮箱 ,1993年01期
- 【被引频次】1
- 【下载频次】136