【摘要】 对不同方法制备的不同厚度的铝衰减膜,用微机控制α测厚仪测量了膜的质量厚度以及膜厚均匀性,用Auser电子能谱(AES)对铝膜进行了组分的表面和深度分布分析,根据铝KLL Auger特征谱揭示了氧化膜的化学组分并测量了氧化膜厚度随放置时间的变化,还讨论了膜中其它杂质含量的上限。更多还原

【Abstract】 Aluminium attenuation foil with various thickness was fabricated by different methods , and the mass thickness and thickness homogeneity of the foil were measured by a computerized α mass thickness measurement apparatus. The surface chemical component and depth distribution in the foil were analysed by using Auger Electron Spectroscopy (AES). The chemical components of oxide layer were renealed by Al K.LL Auger characteristic peak and the change of oxide layer thickness with storage time were measured, Also, the upper limit of other impurity contents of the foil were discussed.更多还原