【摘要】 研究了四氯化钛、氮气、甲烷通入量对 PCVD 法沉积 TiN、TiCN 涂层硬度、沉积速率以及颜色的影响,进行了磨损试验。结果表明,不同色泽的 TiN 膜中,以金黄色 TiN 涂层硬度最高,磨损量最小。更多还原

【Abstract】 the microhardness,deposition rate and colour of TiN,TiCN films deposited by DC—PCVD were studied with different amounts of TiCl₄,N₂ and CH₄.The wearing test was per-formed.The experimental results showed that among titanium nitride films of different colour,thegolden film had the maximum microhardness and the minimum wearing loss.更多还原