【摘要】 水平沟道场控晶闸管是一种新型结构的场控晶闸管,它与一般晶闸管相比具有开关速度快、制作工艺简单、与集成电路工艺兼容等优点.本文概述了这种器件的原理、设计与制作工艺.更多还原

【Abstract】 This paper is to introduce a new structure of field-controlled thyristor with Lateral channel. This deviceis possessed of some advantages, such as manufacture simplicity, high switching speed and compatibility withIC in monlithic mode. The reports about this new structure have not been found in the world until now. Thestructure has been fabricated by using V-groove etching instead of boron diffusion.更多还原