【摘要】 本文介绍了硅片背面激光损伤吸杂实验,用金相显微镜观察证实了高温退火后激光损伤的热稳定性,研究了激光损伤对氧化层错(OSF)和载流子寿命的影响,用中子活化分析法测出了吸杂效果。更多还原

【Abstract】 The gettering experiment of laser irradiation damage on the back surface of a silicon wafer is presented. It is observed by a microscope that the defects induced by laser after high temperature annealing are thermally stable. It is examined that the oxidation induced stacking faults and the minority carrier lifetime are affected by laser damage gettering. The gettering effect is studied by neutron activation analysis.更多还原