【摘要】 利用双探针测得了管式射频等离子体反应器内电子密度的轴向和角向分布,并制得了SnO₂透明导电薄膜.实验表明,薄膜的沉积速率、电学性能及结晶形态受等离子体电子密度的影响较大.在电子密度高的地方,薄膜沉积速率快,薄膜电阻低,其薄膜的晶粒也均匀细微密集.更多还原

【Abstract】 The relationships between the electron density distributions and the properties of SnO2 film in PCVD are studied. The plasma electron density distributions along the axial and angular directions are diagnosed by a double probe. Experimental results show that the film depositing rates ,the electrical properties of SnO2 film and the crystalline state strongly depend on the plasma electron density. Where the electron density is high, the film depositing rate is also high and the sheet resistance of SnO₂ film is low; the crystalline state of SnO2 film is uniform and highly concentrated.更多还原