【摘要】 在室温和无添加气体条件下,完成了六甲基二硅胺烷较低功率密度的等寒子体聚合。研究了聚合膜的沉积规律和过程。给出了聚合物膜的结构和性质。得到经验式为 C_1.42H_2.65N_0.2O_0.15Si的新聚合物。更多还原

【Abstract】 The plasma polymerization of hexamethyldilazane has been carried out under the conditions of room temperature,no adding gas and lower power densi- ty.The deposition law and growth process of polymerized film have been studied.The structure and properties of film have been characterized and tested.The empirical for- mula of new polymer is C₁.₄2H₂.₆5N₀.2O₀.15Si.更多还原