【摘要】 采用SEM,TEM及XRD等手段,对氮化硅晶须的形貌、生长过程中出现的液相组成及其对氮化硅晶须生长与组成的影响进行了探讨。结果表明:晶须頂部液滴质量组成主要为:Si 66.39％,Al21.37％,Fe 8.56％;该液相除作为晶须生长的介质外,其中组分Al直接参与了氮化硅晶须的生长,生成了α-sialon.且有一部分Al³⁺起了补偿电荷的作用。更多还原

【Abstract】 The composition of liquid phase at whisker tip was analysed by EDAX and the effect of the liquid phase on the growth and composition of Si₃N₄ whisker was studied by SEM, TEM and XRD. The results show that the droplet at the whisker tip is composed of 66.39％ Si, 21.37％ Al, 8.56％ Fe, and the element Al in the liquid droplet directly involves in Si₃N₄ crystal growth to form sialon, besides acting as a medium for whisker growth. And a small part of Al³⁺ compensates the imbalance of electrical charges in the crystal structure.更多还原