【摘要】 在700～1000℃下,用无水AlCl₃和NH₃的化学气相淀积反应合成得到了AlN超细粉末,并研究了反应温度、总流量、AlCl₃浓度等对AlN粉末理化性质的影响。结果表明:（1）粉末的形态受反应温度和[NH₃]/[AlCl₃]的影响;⌒2)粉末的粒度与分布宽度随反应温度的增加、总流量的增加以及AlCl₃浓度的减小而减小;（3）产物AlN粉末中晶态AlN的含量随反应温度的升高而增加;（4）产物A1N中副产物NH₄Cl可经600℃热处理除去;（5）非晶态AlN在1450℃下可转变为晶态AlN,其粒径小于250nm,几何标准方差GSD小于1.3,氮含量大于33.5％,氧含量小于1％,氯含量小于0.1％,阳离子杂质含量小于1.5×10^-2％。更多还原

【Abstract】 Ultrafine AIN powder was synthesized by chemical vapor deposition of anhydrous AlCl₃ and NH₃ at 700～1000℃.It is found that the shape of AlN particles varies with temperature and theratio of[NH₃]/[AlCl₃], and that the particle size and distribution of width decrease with the increase of temperature and total flow rate, but the decrease of AlCl₃ concentration. The content of crystalline AlN in the product increases with the increase of reaction temperature. The by-product, NH₄Cl which coexists with amorphous AlN, is easily eliminated by heating at 600℃. Amorphous AlN can be changed into crystalline AIN at 1450℃ with particle size less than 250nm, a geometric standard deviation （GSD） less than 1.3, content of nitrogen greater than 33.5％, content of oxygen, chlorine and metallics less than 1.0％, 0.1％, 1.5×10^-2％ respectively.更多还原