节点文献

化学气相淀积技术合成AIN超细粉末

ULTRAFINE AIN POWDER SYNTHESIZED BY CHEMICAL WAPOR DEPOSITION TECHNIQUE

  • 推荐 CAJ下载
  • PDF下载
  • 不支持迅雷等下载工具,请取消加速工具后下载。

【作者】 李春忠胡黎明陈敏恒朱远征程晓鸣

【Author】 Li Chunzhong Hu Liming Chen Minheng Zhu Yuanzheng Cheng Xiaoming (Technical Chemico-physical Laboratory, East China Institute of Chemical Technology)

【机构】 华东化工学院技术化学物理研究室华东化工学院技术化学物理研究室 上海 200237上海 200237上海 200237

【摘要】 在700~1000℃下,用无水AlCl3和NH3的化学气相淀积反应合成得到了AlN超细粉末,并研究了反应温度、总流量、AlCl3浓度等对AlN粉末理化性质的影响。结果表明:(1)粉末的形态受反应温度和[NH3]/[AlCl3]的影响;⌒2)粉末的粒度与分布宽度随反应温度的增加、总流量的增加以及AlCl3浓度的减小而减小;(3)产物AlN粉末中晶态AlN的含量随反应温度的升高而增加;(4)产物A1N中副产物NH4Cl可经600℃热处理除去;(5)非晶态AlN在1450℃下可转变为晶态AlN,其粒径小于250nm,几何标准方差GSD小于1.3,氮含量大于33.5%,氧含量小于1%,氯含量小于0.1%,阳离子杂质含量小于1.5×10-2%。

【Abstract】 Ultrafine AIN powder was synthesized by chemical vapor deposition of anhydrous AlCl3 and NH3 at 700~1000℃.It is found that the shape of AlN particles varies with temperature and theratio of[NH3]/[AlCl3], and that the particle size and distribution of width decrease with the increase of temperature and total flow rate, but the decrease of AlCl3 concentration. The content of crystalline AlN in the product increases with the increase of reaction temperature. The by-product, NH4Cl which coexists with amorphous AlN, is easily eliminated by heating at 600℃. Amorphous AlN can be changed into crystalline AIN at 1450℃ with particle size less than 250nm, a geometric standard deviation (GSD) less than 1.3, content of nitrogen greater than 33.5%, content of oxygen, chlorine and metallics less than 1.0%, 0.1%, 1.5×10-2% respectively.

【基金】 高等学校博士学科点专项科研基金;国家化学反应工程重点实验室基金
  • 【文献出处】 硅酸盐学报 ,Journal of The Chinese Ceramic Society , 编辑部邮箱 ,1993年01期
  • 【被引频次】25
  • 【下载频次】85
节点文献中: 

本文链接的文献网络图示:

本文的引文网络