【摘要】 I—V特性法表明单层LB聚酰亚胺膜（～0.5nm）MIS结构的界面态密度为10¹²～10¹³cm^-2eV^-1。对11和41层LB聚酰亚胺膜,DLTS测试得到的界面态密度分别为10¹²～10¹³和10¹¹～10¹²cm^-2eV^-1。所有结果表明,在硅禁带中央附近具有较大的界面态密度。更多还原

【Abstract】 Interface traps in Al/LB and mono-(~0.5nm)or multi-layer poly-imide (PI) films/Si structures are studied. The determination of the interface trap parameters is performed by using I-V method and deep level transient spec-troscopy (DLTS). Their densities are in the range of 1012-1013 cm-2eV-1(monolayer and eleven layers) and of 1011-1012 cm-2eV-1 (forty-one layers). It is very interesting that there is a maximum near the silicon midgap.更多还原