【摘要】 叙述了一种制作双极型晶体管的T形电极结构自对准工艺。利用该工艺已研制成微波T形电极晶体管(TSET)。最高振荡频率为10GHz,截止频率为6GHz;在3.2GHz下,输出功率1.1W,功率增益6dB。更多还原

【Abstract】 A self-aligned technology for bipolar transistor with a T shape elec-trode structure has been proposed. Microwave TSET has been fabricated with 10 GHz maximum oscillation frequency and 6 GHz out-off frequency. The transistor has1.1 W output power and 6 dB power gain at 3. 2 GHz.更多还原