【摘要】 自对准技术是一种新的光纤与波导的对准技术,它更适宜光纤、波导阵列的对接。这种方法是利用V型槽的硅片与波导表面重叠调整而实现。它消除了角调整,化6维调节为2维调节。自对准V型槽的参数设计及腐蚀必须十分精细,它也是自对准技术的关键。更多还原

【Abstract】 Self-Alignment Technique is a new fiber-waveguide alignment method suitable for attachment of fiber-waveguide array. It is realized by using an overlap and alignment between an etched silicon surface and the top surface of the waveguides. It eliminates the need for alignment in all angular and reduces the six degrees of freedom to the two degrees of freedom. Preceision parameters’ design and etching of silicon V groove are the keys of self-alignment technique.更多还原