【摘要】 报导了对圆形平面靶直流磁控反应溅射生成的SnO₂薄膜的实验测试和对实验结果的分析。研究结果表明,SnO₂薄膜对一些有毒气体或可燃性气体有强的气敏效应和良好的选择性。对SnO₂薄膜的掺杂可大大改变气敏元件的灵敏度、选择性和工作温度。本文还对其工作机理进行探讨及提出可能的解释。更多还原

【Abstract】 SnO₂ films deposited by magnetic reactive sputtering are tested and the experimental results are discussed. The results indicate that the SnO₂ films have a strong gas-sensitive effect and a good selectivity for some poisonous or combustible gases. The sensitivity, selectivity and working temperature for some gases vary greatly with doping elements in the SnO₂ films. The work mechanism of SnO₂ films is studied and some explainations are proposed.更多还原