【摘要】 分析指出,通过直接投影和Talbot成像用准分子激光可直接刻蚀二维周期结构。实验研究表明,对于不同厚度的Al膜有不同的刻蚀能量阈值和不同的最佳刻蚀能量,用Xec1准分子激光刻蚀Al膜得到了二维周期阵列。更多还原

【Abstract】 Theoretical analysis indicate that the quasi-molecule laser can be directly used to etch a periodic array by means of direct projection and Talbot image. Experimental investigation shows that for A1 thin fimls of different thickness there are different etching power density threshold and different optimum etching power density. The two-dimensional periodic structures are obtained by direct etching a A1 thin film with the Xecl quasi-molecule laser.更多还原