【摘要】 本文讲述了一种由光学系统、扫描平台、微机为核心组成的光探测器响应度均匀性的自动测量装置。光学系统产生φ0.2mm光斑;在微机控制下,平台可作X,Y方向的25mm平移及绕中心旋转,最小平移进退间距0.01mm,最小旋转角间隔1/24度。测量系统稳定性达0.05%,扫描系统的重复性在0.05%以内,被测探测器定位及光入射角调整误差0.23%,装置的总不确定度0.26%。更多还原

【Abstract】 An automatic measuring unit for photodetector response uniformity consist-ing of optical system,scanning stage and microcomputer is described in the paper. 0.2mmspot can be generated by the optical system.With the control of a microcomputer,the stagecan move in X and Y directions for 25mm and rotate around the center,the minimummoving space is ±0.1mm,and the minimum rotating angle of 1/24 degree. The stabilityis 0.05%,repetitiveness of the scanning system within 0.05%,both locating error and inci-dent angle adjusting error are 0.23%,the overall indeterminateness is 0.26%.更多还原