【摘要】 本文讨论了圆形样品电阻率测量中样品厚度和结点尺寸的影响,指出当样品厚度d小于结点间距的一半时,可用公式p=p₈d直接计算样品电阻率,误差不超过0.5％,其中p₈为样品平面电阻率。结点尺寸引起的误差一般可忽略。对小样品电阻率的测量,结点呈正方形分布可得到更为准确的结果。本文还利用保角变换的方法给出了弓形样品电阻率测量的方法和结果。更多还原

【Abstract】 In order to make an accurate measurment of the resitivity of circluar isotropic samples, the effect of the sample thickness d and the contact size is discussed. The body resitivity p can be cac-ulated by p=psd, where p is the sheet resitivity, to an accuracy better than 0. 5%, when the thickness is less than half of the distance between the adjacent probes. The errors introduced by the finite sizes of the contacts can be generally neglected. It is deduced that the square probe array is preferable on small samples on the grounds of accuracy. An method for resitivity measurements of bowshaped samples is also obtained by using the conformal transformation of a segement into a circle.更多还原