【摘要】 正在研制的激光定位吊装结构工作台系统是电子束曝光机的主要组成部分。本文概述了工作台吊装结构的特点,用有限元法建立了吊装结构的三维实体力学模型,在理论上对其进行了静态特性的分析与计算,并用激光散斑法进行了实验验证,设计了工作台装配与调试的工艺支架。理论计算和实验分析充分证明工作台吊装结构能够满足电子束曝光机工作台亚微米定位精度的要求,具有独特的优越性。更多还原

【Abstract】 The laser positioning stage sistem with hoisting structure which is beingdeveloped is a main part of the Electron-beam Lithography Machine.The cha-racteristics of the hoisting structure of the stage are described in the paper.Using the Finite Element Method,the 3-D solid mechanies’model of the hois-ting structure is set up.With the model the analysis and the calculation ofthe static characteristics are done in theory,and they are tested using theLaser Speck Method.An assembling support on which the stage is assembledand tested has been designed.The theoretical calculation and the testing an-alysis show clearly that the hoisting structure of the stage is able to satisfythe requirements of the submicron positioning precision of the Electron-beamLithography Machine stage,and it has unique advantages.更多还原