The key problem in development of ZMR (Zone-Melting-Recrystallization) SOI (Silicon-on-Insulator) technology is detecting of the temperature of the molten zone on silicon wafer. A novel fibre pyrometer with advanced functions (high space resolution and easy aiming) has been proposed to suit the special experimental environment (high frequency, high voltage and high temperatureX which proves to be effective in enhancement of stability, controlling and reproducibility of ZMR technology.
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