【摘要】 本文对以高T_C超导薄膜为探测元的热敏红外探测器进行了理论分析和模拟设计.对影响器件性能的关键因素——热导G和电阻温度系数α,作了深入的理论分析,得到器件结构参数的最佳设计.在此基础上开展了相关的工艺研究:YSZ缓冲层和YBCO超导薄膜的制备;硅基片的微机械加工技术及YBCO膜的激光刻蚀技术.更多还原

【Abstract】 With the development of high Tc superconducting materials, it isnecessary to study their application in a lot kinds of devices. In this paper,we focus on a bolometric infrared detector that uses the resistive transitionof a HTcS thin film as the temperature sensing element, doing its theoreticalanalysis,simulated design and related technological research work.Firstly, we do plenty of further analyses on the thermal conductance and the temperature coefficient of resistance, both of which are the key parameters affecting the properties of the detector. Based on the above, the optimiza-tion of the detectos is obtained and the practicability is also proved.Therefore, we do the following connected technological study-the fab-rication of YSZ layer and YBCO thin film, the micromachined technology of silicon membrane and the laser ablation of the YBCO superconducting films.更多还原