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一种非接触光电尺寸检测仪研制
The Study of an Election-optical Non-contact Measuring Instrument
【摘要】 本文详细论述了非接触光电尺寸检测仪的原理、结构。该检测仪可用于各种材料尺寸,厚度的非接触测量。
【Abstract】 The paper in detail discusses the principle and structure of an election-optical non-contact measruring instrument. This instiument can be used in detecting size and thichness of various materials in non-contact dynamic measurament.
- 【文献出处】 长春光学精密机械学院学报 ,Journal of Changchun Institute of Optics and Fine Mechanics , 编辑部邮箱 ,1993年03期
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