【摘要】 本文论述了一种高精度非接触表面粗糙度测量装置,此装置采用反射光位置判别法,用半导体激光器作光源,CCD器件作光电接收器件,具有精度高,测量速度快,体积小,重量轻的特点,可用于在线测量。更多还原

【Abstract】 In this paper, a high resolution nontact measure equipment is discussed. The principle of it is method of reflected light position detection. The light source of the apparatus is a diode laser and photo-electric chang diode is CCD device. It is high in resolution, small in volume, little in weigh and measure quickly. It can be used in-process.更多还原