【摘要】 从等离子体流体力学方程出发,求导了负电性气体中等离子体流体模型定律,根据这个定标律,可以从放电电压V_rf、气压P_r、功率P_w,直接得到等离子体中电子密度N_e,负离子密度N_-、正离子密度N_+、电子温度Te及等离子体中各中间产物的密度及其与放电宏观参数的关系。为研究等离子体中粒子输运过程和等离子体与材料相互作用过程提供了一个重要手段。更多还原

【Abstract】 A scaling law of fluid model of electronegative gas plasma has been developed. Using this scaling law,the electron density ,densities of negative and positiveions ,electron temperature, the flow of positive ions towards the electrode and the ensities of nertral radicals can be calculated form macroscopical parameters of discharge:power(Pw),voltage(Vrf),and pressure(Pr) directly. There are good agrem-nts between calculated results and experimental data in the experiment range of pressure 50-250m モ ,power 8-25watt. the error<5%.The main idea,the deductive process of this law and the calculated results are reported in this paper.更多还原