节点文献
聚合物半导体PAn表面场效应管
Polyaniline Surface Field Effect Transistor
【摘要】 本文报道了采用特殊的器件和工艺设计研制的聚合物半导体(PAn)表面场效应晶体管。其中,PAn膜为半导体层;两个相距20微米的金电极作源、漏;硅片为栅;热氧化二氧化硅膜做绝缘层。本文对PAn表面场效应晶体管的特性进行了测试和分析。
【Abstract】 A Polyamline surface field effect transistor in which a PAn film acts as the semiconductorlayer, two Au electrodes seperated from each other by 20μm are utilized as the source and thedrain, a Si wafer serves as the gate and a thermally grown SiO2 film is used as the gate insulatorlayer was fabricated. The characteristics of the PAn surface field effect transistor havebeen measured and analyzed.
- 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1993年12期
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