A structure improved silicon based micro electrostatic motors is described. On-chip detectionof micromotor rotation speed is realized by fabricating photovoltaic devices on the siliconsubstrate beneath the rotors, and this is very important to realize the automatic control ofrotation speed and fabricating various sensors.By the use of SiO_2/PSG composite sacrificiallayer technology, a curved bearing structure that greatly reduces the frictional torque is fabricated.The micromotors are between 100 and 120μm ...
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