【摘要】 利用傅里叶变换红外光谱仪和X射线激发的CKLL俄歇谱的一次微分表征了类金刚石（DLC）膜的微结构。指出在高离子能量轰击和低CH₄压强下所形成的DLC膜内以sp³C-C键为主,并且sp³碳成分随V/Pa^1/2 增加而增加,与退火温度从200℃ 到800℃无关,DLC膜具有好的热稳定性。DLC膜密度研究指出:膜密度与沉积参量和基底材料有关。更多还原

【Abstract】 Microstructure of diamondlike carbon（DLC）films were characterized using Fourier transformIR spectroscopy and CKLL first-derivative X-ray excited Auger electron spectra.Theseexaminations show that sp³ C-C bonds are dominate in DLC films formed under high ion bombardmentenergy and low CH₄ pressure, and sp³ carbon component increases with V/Pa^1/2,DLC films have good thermal stability whatever the annealing temperatures ranging from200-800℃. An investigation of the densities of DLC films showed that the densities of films are ralatedto deposition parameters and substrate material.更多还原