节点文献

用电子束蒸发法制备ZrO₂薄膜

ZrO₂ Thin Films Prepared by Electron Beam Vapour Deposition

推荐 CAJ下载
PDF下载
不支持迅雷等下载工具，请取消加速工具后下载。

【Author】 Lou Chaogang, Zhang Xuehua, Liang Houyun, Shi Dongqi and Hua Shoumei (General Research Institute for Non-Ferrous Metals Beijing)

【机构】北京有色金属研究总院；北京有色金属研究总院；

【摘要】采用电子束蒸发的方法制备ＺｒＯ２薄膜，经Ｘ射线衍射和Ｘ光电子能谱分析证实：薄膜为具有立方结构的ＺｒＯ２薄膜，薄膜中缺氧，Ｙ原子的百分含量比蒸发原料中高．更多还原

【Abstract】 ZrO2 thin films Were prepared by electron beam vapour deposition. The analysis of XRD ac XPS showed that this films were ZrO2 films with cubic structure. They were the lack of oxygen and had more Y atoms than the initial materials更多还原

【关键词】电子束蒸发； ZrO2；薄膜；