【摘要】 本文讨论了用AES分析SnO_x超微粒子薄膜表面的有关问题。观察分析了成分和导电性不同的样品经离子束轰击清洗表面后,在AES的探针电子束连续轰击下,表面俄歇信号的峰形变化。利用SEM观察比较了离子束和电子束轰击区域和非轰击区域的图像。并与热退火样品作了对比。结果显示,轰击区域超微粒子薄膜的表面形貌变化很大,平均粒径显著增加。更多还原

【Abstract】 The problems associated with the Auger electron analysis of SnO_x ultrafine particle films are discussed. The observation that the Auger signals of the individual composition and conductivity samples, after a bombardment of ion beam cleaning, vary with the bombardment of electron beam analyzing is described. In addition, SEM images of the bombardment area and unbombardment area, along with that of annealing,are proposed. The results show that the surface morphology in the bombardment area of the ultrafine particle film changes greatly, and the average particle size increases significantly.更多还原