【摘要】 使用2.45GHz,TE₁₀模式的微波在由Nd-Fe-B永久磁钢形成的多极磁场中产生了ECRM等离子体。利用这种等离子体通过反应溅射法在室温基片上制备了具有C轴取向的ZnO薄膜。等离子体的轴向分布依赖于等离子体腔室中的磁场形态。XRD,TEM和SEM的分析表明,淀积的ZnO薄膜的晶粒尺寸为nm量级,致密而又平滑,具有良好的C轴取向度。更多还原

【Abstract】 Zinc oxide (ZnO) films with c-axis orientation have been prepared on the room temperature substrates by a reactive sputtering deposition utilizing electron-cyclotron-resonance multipolar (ECRM) plasma apparatus built with Nd-Fe-B magnets and 2. 45 GHz, TE10 mode microwave. The plasma distributions in the axial direction were found to be sensitive to the magnetic field configurations in the plasma cavity. The XRD, TEM, SEM analyses indicated that the deposited ZnO films were nanometre size, smoothness and dense with high c-axis orientation.更多还原