【摘要】 本文通过正交工艺试验和研磨试验,确定了影响抛光磨石硬度的几个因素,以及它们各自的影响程度,确定了组成磨石各成份的比例,固化剂的极限用量,最后给出了抛光硅质板的磨石最佳硬度。更多还原

【Abstract】 This paper mainly introduces two ewpriments on qrindstone of polishing silicon slab,through that we determine the factors which one affects the ball hard hard ness of grindstone largest,Wc also detrmine the proportion of each conponcnt of grindstone composition,the maximum usage of solidfied pharmaceutical,last,we put forward a optimum grimdstone hardness for olishing silicon slab更多还原