【摘要】 在100keV入射能量下.分别测量了Ne~-、Ar~+在铜靶上所产生的溅射原子角分布与离子入射角度的关系 实验结果表明在40°和70°斜入射条件下,Ar~+所产生的溅射原子角分布的溅射优先方向分别位于表面法线的两侧,溅射原子角分布关于表面法线明显不对称;而Ne~+所对应的溅射优先方向都位于表面法线方向,且溅射原子角分布关于表面法线是对称的、用TRIM程序计算了Ne~+和Ar~+在铜靶中的能损和投影射程,并依据所计算的结果用级联碰撞理论分析了实验结果,比较了Ne~+和Ar~+各自溅射机制上的不同.更多还原

【Abstract】 The angular distributions of sputtered atoms of copper target bombarded by lOOkeV Ne+ and Ar+have been measured respectively. At 40°and 70° oblique incidence, the preferential sputtering directions of sputtered atoms caused by Ar+ are on the two sides of the surface normal and the angular distributions are not symmetric about the surface normal;the preferential sputtering directions at the same incident angles for the incidence of Ne+, however, are both in the directions of surface normal and the angular distributions are symmetric about the surface normal. The stopping power and projected range were calculated using TRIM programme and the calculated results combined with cascade collision theory are used to explain the experimental phenomena. The difference of sputtering mechanism between the incidence of Ar+ and that of Ne+ is also compared.更多还原