【摘要】 本文扼要地介绍了几种工业中常用的现代表面分析仪器和方法，如俄歇电子谱（ＡＥＳ）、Ｘ－射线光电子谱（ＸＰＳ）［或称化学分析用电子谱（ＥＳＣＡ）］、二次离子质谱（ＳＩＭＳ）等的基本工作原理、仪器结构、使用方法及其特点，简单讨论了与表面分析有关的超高真空技术、样品表面的清洁、离子束溅射及无损检测等问题．更多还原

【Abstract】 A review is given of the main principles, structure and characteristics of several surf-ace analysis instruments and methods which are usually applied in industry, such as Auger Electron Spectroscopy (AES), X-ray Photoelectron Spectroscopy (XPS), and Secondary Ion Mass Spectrometry (SIMS). Some main problems involved in surface analysis methods including ultra-high vacuum techniques, cleaning of the sample surface, ion beam sputter-ing of the surface and nondestructive analysis are also discussed.更多还原