【摘要】 用能量（112,89keV）和剂量(1×10¹⁷,5×10¹⁶个/cm²)配比不同的H⁺束对双离子束溅射淀积的类金刚石碳（DLC）膜进行辐照,用Raman光谱、红外透射光谱和膜层电阻率测量、粘着力测定等多种手段对辐照前后的DLC膜进行,表征和分析,结果表明,高能H⁺束辐照效应跟高能重离子辐照效应是不同的,H⁺束辐照使膜层sp³C—H键相对减少,sp²C—H键相对增多;sp³C—C和sp²C—C键组分降低,但sp³C—C键和sp²C—C键的相对比值增高,这导致被辐照膜层在某种程度上保持甚至超过了原膜的红外透射性及电阻性能,认为,通过系统的实验,有可能用高能H⁺束辐照DLC膜以改善其光电行为。更多还原

【Abstract】 Diamond-like carbon (DLC) films, prepared by dual-ion beam sputtering method on glass substrate, were irradiated by high energy hydrogen ions(H + ) under different combinations of ion energy and irradiation dose. Raman spectroscopy, infra-red transmittance spectroscopy, electrical resistivity measurement and adhesive force determination were used to characterize the as-deposited and the irradiated films. The results showed that, comparing with that of as-deposited ones, the properties and structures of irradiated films were changed obviously: the infra-red transmittance in the range of 1450 to 6000 cm-1 was increased; the electrical resistivity had nearly no large change. The relative ratios of sp2 C-H bond to sp3 C-H bond and sp3 C-C bond to sp2 C-C bond were also increased, while the component of sp3 C-C bond and sp2 C-C bond was decreased because of H+ irradiation. On the basis of the above results., the relations between properties and structures for irradiation On the basis of the above results, the relations between properties and structures for irradiated films were discussed in detail between properties and structures for irradiated films were discussed in detail. It is concluded It is concluded that the H+ irradiation effect on DLC films is different from that of Cc or other heavier ions. The main role of H+ on the films is the teching effect on weaker bonds. We believe that it is possible to improve the properties of DLC films by means of high energy H+ irradiation.更多还原