【摘要】 本文报道了低压气相直流辉光放电沉积a-C:H膜和膜的部分物理、化学性质.这些性质非常接近于硅电池AR膜的最佳要求.在硅单晶太阳电池表面沉积1000(?)左右的a-C:H膜作为AR膜,在部分电池上获得了与SiO AR膜可比的结果.更多还原

【Abstract】 In this letter we report the synthesizing prosses of amorphous-C:H film by chemical vapor deposition with DC glow discharge under low pressure condition.Some physical and chemical properties of the films are also studied.The properties approach the optimum demand of the anti-reflection coating of solor cells.Using the amorphous-C:H film,thickness is about 1000A,as anti-reflection coating of sillon solor cells we have found that the effect can be compared with SiO anti-reflection coating for some cells.更多还原