【摘要】 本文综述了准分子激光光刻的发展,着重讨论准分子激光光刻的优点及其在提高分辨率方面的进展,并讨论了今后的动向。更多还原

【Abstract】 The developments of excimer laser lithography have been reviewed, the emphasis of discussion is placed on the advantage of excimer laser lithography, the development on resolution increase and the glorious future has been discussed as well.更多还原