节点文献

ELASTIC RECOIL DETECTION ANALYSIS OF LIGHT ELEMENTS IN THIN FILMS USING 35 MeV35 Cl6+ BEAM

  • 推荐 CAJ下载
  • PDF下载
  • 不支持迅雷等下载工具，请取消加速工具后下载。

【作者】 杨熙宏； 韦伦存； 李认兴； 于金祥； 梁斌； 任晓棠； 王兆江； 洪秀花； 张利春；

【Author】 Yang Xihong Wei Luncun Li Renxing Yu Jinxiang Liang Bin Ren Xiaotang Wang Zhaojiang Hong Xiuhua Zhang Lichun(Peking University, Beijing 100871, China)

【机构】 Peking University Beijing 100871 China； Peking University Beijing 100871 China；

【摘要】 <正> In this paper, an elastic recoil detection analysis method is described using 35 MeV 35Cl as incident ions. This method can determine and profile simultaneously H, D, He, C and O or in the other case, H, C, N and O. The depth resolution for the elements heavier than He is better than 20 nm. It has been applied to study the Co/Si and TiN thin films, and the depth profiles of He implanted in monocrystal silicon.

【Abstract】 In this paper, an elastic recoil detection analysis method is described using 35 MeV 35Cl as incident ions. This method can determine and profile simultaneously H, D, He, C and O or in the other case, H, C, N and O. The depth resolution for the elements heavier than He is better than 20 nm. It has been applied to study the Co/Si and TiN thin films, and the depth profiles of He implanted in monocrystal silicon.

【关键词】 Elastic recoil detection analysis Depth Resolution Mass resolution He implantation profile Co/Si and TiN thin films；
【Key words】 Elastic recoil detection analysis Depth Resolution Mass resolution He implantation profile Co/Si and TiN thin films；
  • 【文献出处】 Nuclear Science and Techniques ,核科学与技术(英文版) , 编辑部邮箱 ,1992年03期
  • 【被引频次】1
  • 【下载频次】12
知网节下载
节点文献中： 

本文链接的文献网络图示:

本文的引文网络
二级参考文献(0)
参考文献(0)
共引文献(0)
节点文献
同被引文献(0)
引证文献(0)
二级引证文献(0)