【摘要】 本文在实验研究的基础上论述了超光滑反射镜基片的精密抛光技术。通过抛光模、抛光液、抛光压力、抛光速度等对抛光质量影响的研究,提出了获得0.1nm(?)级表面粗糙度,无损伤超光滑光学表面的工艺参数组合。更多还原

【Abstract】 Precision polishing of ultra-smooth reflector substrates is stated after experiments. Through study of influenoe of polishing tools, compounds, pressure and speed on polishing quality, a group of technical parameters are given for non-defective ultra-smooth optical surface with roughness of the order of0.1nm (A).更多还原