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离子束刻蚀软X射线透射光栅实验研究
Investigation of soft X-ray transmission grating made by ion beam etching technique
【摘要】 利用全息-离子束刻蚀方法研制出了聚酰亚胺薄膜为衬底的金软X射线透射光栅.研究了光栅制作中曝光量、显影条件和离子束刻蚀工艺等因素对光栅参数的影响,并给出了在惯性约束激光核聚变实验研究中的应用结果,
【Abstract】 Soft X-ray gold transmission grating with polyimide membrance substrate is fabricated by holograph-ion beam etching technique. The exposure, development and etch conditions for fabricating grating are investigated and its experimental results used in inertial confinement fusion are given in this paper.
- 【文献出处】 光学学报 ,Acta Optica Sinica , 编辑部邮箱 ,1992年09期
- 【被引频次】8
- 【下载频次】55