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激光横向模式的针扫描法测量

Needle-Scaning Method for Laser Beam Mode Measurement

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【作者】 徐庆鸿陈彦斌孟庆友里强

【Author】 Xu Qinghong Chen Yanbin Meng Qingyou Li Qiang

【机构】 哈尔滨工业大学哈尔滨工业大学

【摘要】 激光求的径向功率分布,即横模不仅是光束本身的一个重要质量参数,而且也是激光加工中的一个引人注目的问题,横模测量的意义在七十年代初就开始吸引人们从事这方面的研究,目前发展起来了包括红外摄像、烧蚀有机玻璃,扫描、热蒸发、光热偏转、干涉等方法在内的许多测量方法。但国内采用的方法非常有限,常用的是激光烧蚀有机玻璃的实验,这种方法本质是对光束连续作用的统计,不能真实地反映光束径向能量的场分布。本文发展了一种针扫描测量光束径向能量分布的方法,并进行了试验。该系统由扫描、传感、数据采集、处理等单元构成,设计性能可以在百瓦到千瓦的功率水平上测量束径(0.2~35)mm 光束的横模,结果经处理、显示,可以得到光求横模的三维分布。

【Abstract】 The radius power distribution of laser beam is not only a im- portant parameter of beam itself,but also a remakable problem in laser process.The importance of beam mode measuring has inter- ested many research workers working on it since the early 70s.Many methods,including infrared photography,plexiglass burning off, scanning,heat evaporating,thermal deflection of light,interference etc,were developed,but limited of them were applied in China, only plexiglass burning off is in common use.Unfortunately,this method can only offers a statistical result of laser’s radiation, but not the real power distribution of the laser beam. In this paper,the needle scanning method is presented which is formed by four units,including scanning,sensing,data acqu- ition and handling.The experiments are also presented.The de- sign capacity of this system permits measuring of beam of 0.2— 35mm diameter in 10~2—10~3W power level,and the three dimentions power distribution was finally presented by data handling unit.

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