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由聚硅氮烷热解制得的Si-N-C陶瓷的结构与特性
The Structure and Properties of Si-N-C Ceramics Obtained by Pyrolysis of Polysilazane
【摘要】 研究了由聚硅氮烷(PSZ)和聚碳硅烷(PC)热解制得的三种陶瓷的组成、结构与特性。PC热解到1250℃产生Si-C陶瓷,其结晶相是β-SiC微晶,PSZ在N2或N2+NH3中热解分别产生Si-N-C与Si-N无定形陶瓷。这三种陶瓷在Ar气中处理到1500℃以研究其热稳定性。结果表明,Si-C陶瓷从微晶变为β-SiC结晶态,Si-N陶瓷从无定形变为α-Si3N4并伴随着可观测到的重量损失,而Si-N-C陶瓷维持其元素组成及β-SiC微晶态直到1500℃。
【Abstract】 The composition, structure and properties of three kinds of ceramics obtained by pyrolysis ofpolysilazane (PSZ) and polyearbosilane (PC) are studied. The pyrolysis of PC to 1250℃ yields Si-Cceramic which is β-SiC microcrystal, while the pyrolysis of PSZ in N2 or N2+NH3 atmosphere yields Si-N-C and Si-N amorphous ceramics. The three kinds of ceramics are heat-treated between 1300℃ and 1500℃in Ar gas to have their thermal stability examined. The result shows that Si-C ceramic changes frommicrocrystal to β-SIC crystalline, Si-N ceramic from amorphous to α-Si3N4, accompained by the observableweight loss, while Si-N-C ceramic retaines its elemental composition and β-SiC microcrystalline state up to1500℃
【Key words】 Polysilazane; Pyrolysis; Silicon nitride; Silicon carbide; Thermal stability;
- 【文献出处】 高技术通讯 ,High Technology Letters , 编辑部邮箱 ,1992年09期
- 【分类号】TQ174.1
- 【下载频次】80