【摘要】 首次研究了用PECVD方法制作的氮氧化硅光波导在超大规模集成电路光互连中的应用。以光致抗蚀剂波导为例,初步探讨了有机物和聚合物在光互连中的应用前景,并指出了现存问题及发展方向。更多还原

【Abstract】 The silicon oxynitride waveguides made with PECVD method was applied to guided- wave optical interconnection in VLSI. The KPR (Kodak photoresist) material was used to inquire into the application of nonlinear organic materials and polymers to optical interconnections. The existing problems in technological process and the approaches to deal with them were also discussed.更多还原